Understanding sheet resistance is essential for characterising thin films in advanced manufacturing, particularly in the production of Tunnel Oxide Passivated Contact (TOPCon) solar cells. A recent article published by AZoM explores how accurate sheet resistance measurement plays a critical role in optimising doping levels, ensuring the electrical properties of semiconductor layers meet stringent performance criteria.
The article highlights the KLA Instruments™ Filmetrics® R54 as a key solution for non-destructive, precise sheet resistance measurement. This system uses a four-point probe method within a carefully designed enclosure to minimise interference and improve consistency. Its setup is tailored for high-accuracy testing of square silicon samples, such as those used in solar cell development.
The AZoM article further explains how the R54 corrects for edge effects, geometry variations, and photocurrent generation, all of which are crucial for maintaining measurement fidelity in production environments.
At Omniscan, we align with these advances by offering cutting-edge metrology tools such as the R54 system. Accurate sheet resistance data ensures control over diffusion and deposition processes, helping our clients achieve better efficiency, yield, and long-term performance. To discover how Omniscan can help you, get in touch today.
Read the full article here for further technical insights: AZoM – Sheet Resistance Measurement in TOPCon Solar Cells


